Generic distortion model for metrology under optical microscopes
Title: | Generic distortion model for metrology under optical microscopes |
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Kind : | Journal Papers |
Published In: | Optics and Lasers in Engineering, Vol. 103, pp. 119-126, April |
URL : | https://www.sciencedirect.com/science/article/pii/S0143816617307856#! |
Year : | 2018 |
Authors : |
Xingjian Liu Zhongwei Li K. Zhong YuhJin Chao Pedro Miraldo Yusheng Shia |
Lab : | Intelligent Robots and Systems Group (IRSg) |